- 北京瑯東科技有限公司
- 聯(lián)系人：薛經(jīng)理
- 手機(jī)：13552311591
- 電話：010-8260-0995
- 網(wǎng)址：www.panpal.com.cn
- 地址：天津市濱海新區(qū)啟發(fā)大廈
激光微納加工系統(tǒng)
激光微納加工系統(tǒng)
Item | Descriptions | |
Transport X-Y-θ-Z Stage & Chuck | ||
1 | X-axis | |
2 | Y-axis | Travel : 200mm, 1um accuracy, Res: 0.1um |
3 | Z-Axis | Travel : +/-10mm, 1um accuracy, Res: 0.1um |
4 | q Stage | |
5 | Stage speed | X dir.: 150mm/s Y dir.: 150mm/s |
6 | Chuck Size | Vacuum chuck; 6” wafer |
System Requirements | ||
1 | Wafer Size | 6”-15‘’ maximum |
2 | Throughput | TBD |
3 | Process Chamber Illumination | Yes |
4 | Debris removal | Include low flow debris removal –air blow 15-20 psi |
5 | Power Distribution Unit (PDU) | Included |
PC And Interface Requirements | ||
1 | Computer | Industrial PC; Windows operating system |
2 | System Interface | Keyboard, Mouse |
3 | Software Features | Recipe Based, 2-level login access |
4 | Image recognition Capability | Embedded in Software |
Facility Requirements | ||
1 | Equipment Dimensions | 1m x1m x1.8m (estimated) |
2 | Weight | TBD |
3 | Working Environment | 100K cleanroom |
4 | Laser System Safety | Class-I |
5 | Air Supply | CDA, 25-20 psi |
6 | Vacuum | Equipped with vacuum generator |
7 | Exhaust for Debris Removal | Exhaust connection required |
8 | Power Supply | 110 or 220VAC input, 8kW max Factory configurable |
